The size of perturbation that can be detected in the validation experiments will depend both on the change in the values of the measures as a function of misregistration and the standard error of those values. To quantify this, the sensitivity of a measure was defined as follows.
where is the value of the measure for some degree of deformation , is the standard error of the estimate of . is the change in required for to change by one noise standard error, which indicates the lower limit of change in misregistration which can be detected by the measure. is a function of ; to simplify comparison between different methods of evaluation, we also use the mean sensitivity over a range of values of .
In order to compare the sensitivities of different methods of evaluation, the expected error in also needed to be estimated. Since the validation experiments provided repeated estimates of , one can obtain empirical estimates of the errors in , , and . These can be combined, using error propagation in Equation 7.1, to estimate the uncertainty in the estimate of sensitivity.
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Roy Schestowitz 2010-04-05