The size of perturbation that can be detected in the validation experiments will depend both on the change in the values of the measures as a function of misregistration and the standard error of those values. To quantify this, the sensitivity of a measure was defined as follows.
where is the value of the measure for some degree of deformation
,
is the standard error of the estimate of
.
is the change in
required for
to change by one noise standard error, which indicates the lower limit of change in misregistration
which can be detected by the measure.
is a function of
; to simplify comparison between different methods of evaluation, we also use the mean sensitivity over a range of values of
.
In order to compare the sensitivities of different methods of evaluation, the expected error in also needed to be estimated. Since the validation experiments provided repeated estimates of
, one can obtain empirical estimates of the errors in
,
, and
. These can be combined, using error propagation in Equation 7.1, to estimate the uncertainty in the estimate of sensitivity.
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Roy Schestowitz 2010-04-05